A UHV evaporation chamber dedicated to metallic multilayers growth has been developped :
Base pressure <10-9 mbar
- Two electrons guns (7 materials each) able to operate simultaneously for alloys of defined composition (3 quartz microbalances and feedback)
- Evaporation cell
Sample environnement :
- Temperature : 150K to 1000K (LN2 cooling/furnace)
- Azimuthal rotation and tilt
- Stamping of 2D materials in the load lock
Typical material list :
- Magnetic materials (Fe, Co,Ni, NiFe, CoFe etc)
- Rare Earths (Gd,Tb,Ho,Tm etc)
- Other metals (Nb, Pt, Au, Al, Ir, Cu etc)