Elemental composition analysis of materials, with the possibility of measurement mapping.
- Molybdenum microfocus X-ray tube (50 W, Incoatec GmbH)
- Multilayer mirrors optics (Incoatec GmbH)
- Fluorescence detector SDD (Ketek GmbH)
- Photodiode for transmission measurement
- Optical camera
- translation stages Y and Z
- X-ray beam with diameter of 100 µm (FWHM)